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ВАКУУМНАЯ ТЕХНИКА > Pfeiffer Vacuum > Безмасляные насосы для полупроводниковой промышленности > Plug and Play Pumping Systems ATPS Series

 

Advanced solutions for the semiconductor industry

ATPS 42 with 4 x A300s

 

ATPS 82

 

ATPS 42 with A300s + Roots

Using new technology
Adixen by Pfeiffer Vacuum took the benefit of A100 and A300 compactness to design a modular tool pumping system able to meet the need of most tools and applications. This range is composed of two versions : ATPS 42 and ATPS 82, depending on the pumping line configuration. Optional abatement systems can be integrated on the right side.
High performance and lower noise level
• 100 to 1 700 m3/h independentpumping line combinations are available
• Pumping speed and ultimatevacuum are similar to or better than corresponding conventional pumps
• Noise level is divided by morethan two compared to conventional pumps.
Save footprint for a variety
of applications

• Between 30 and 50 % footprintgain when compared to stacked conventional pumps with the same pumping capacity, even more when compared to a typical full on-floor pump configuration
• All existing semiconductorapplications are covered such as etch, HDPCVD, PECVD, SACVD, LPCVD, RTP-CVD,...
Increased safety
• Exhaustable enclosure for all pumps including pump outlet connections and abatement system
• Optional safety sensors such as gas or smoke/fire sensors
• Lower pump weight means safer handling.
Faster hook-up
• The centralized utilities and fullydefined vacuum connection locations results in significant reduction in installation and start-up time
• The number of facilities connection can be reduced by more than six.
For 6 to 12" fabs
The Adixen by Pfeiffer Vacuum ATPS series provides the ultimate solution for gaining or saving space in existing or new fabs needing a remote pumping configuration.

 

Outline dimensions

The ATPS 42 and 82 have been designed for abatement system integration. These abatement systems can be provided
by selected partners, having a leading position for each application.
The abatement technologies include, among others, dry bed, burner/wet, wet, or plasma for PFC abatement.
The integrated abatement system enhances ATPS benefits such as footprint reduction, pipework integration and centralized
facilities for faster hook-up/start-up, and higher safety.
       

ATPS 42 + Dry bed abatement

 

ATPS 42 + Burner/wet abatement

 

ATPS 42 + Atm. plasma + Dry bed abatement

*A=1300mm

Faster hook-up

ATPS is shipped with all pumps already installed, fully connected and tested in the frame.

 

Centralized supervision network

Compatible for all Adixen by Pfeiffer Vacuum stand-alone pumps and selected abatement systems!

 

Options / Accessories

A full range of accessories is proposed as:
- a package which includes lighting tower, liquid sensor, air flow sensor, door opened sensors
- powder trap, hot traps, cold traps,... a range of application based solutions to increase pump life time which can be safely integrated within the ATPS
- seismic brackets
- inlet isolation valves, with or without soft pumping
- N2 and cooling water flowmeters  

Traps

Inlet valves, with and w/o soft pumping

 
Lighting tower

Flowmeters


  Seismic brackets


 

Maintenance

Easy maintenance with specific tools  
 

Transport of one A300 pump

 

 

ALT 22 elevating table

 

Technical specifications

ATPS 42

ATPS 82

Peak pumping speed (50/60Hz)

 From 95 to 1 700 m3/h (55 to 1 000 cfm) 

Ultimate pressure w/o purge/ with 35 slm purge, mtorr

 A100/A300 pumping line = 5/ 50
Roots pumping line = 0,5/ 5

Noise level (at ultimate pressure), dBA

58 to 65 dBA * 

Dimensions (W x D x H at top frame, w/o abatement), mm 

 460x1300x1902 

 920x1300x1902 

Power voltage

200-208 V or 380-460 V 

Inlet/outlet size

ISO 63 or ISO 100 / KF 25 

Cabinet exhaust requirements (w/o abatement)

 104 mm O.D, 100 to 150 m3/ (60 to 90 cfm) * - sub-atm > 150 Pa 

Frame footprint w/o abatement

 ~ 0,6 m2 / 6,5 ft

 1,2 m2 / 13 ft2

Frame footprint with one abatement module

~ 1,6 m2 / 17 ft2

 2,2 m2 / 23 ft2

(*) depending on pump configuration

 

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серии A3P Range Plug and Play Tool Pumping Systems ATPS