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Главная/Вакуумная техника/Pfeiffer Vacuum/Безмасляные насосы для полупроводниковой промышленности/ATPS Series

Plug and Play Pumping Systems ATPS Series

Advanced solutions for the semiconductor industry


ATPS 42 with 4 x A300s	ATPS 82	ATPS 42 with A300s + Roots
Using new technology Adixen by Pfeiffer Vacuum took the benefit of A100 and A300 compactness to design a modular tool pumping system able to meet the need of most tools and applications. This range is composed of two versions : ATPS 42 and ATPS 82, depending on the pumping line configuration. Optional abatement systems can be integrated on the right side.	High performance and lower noise level • 100 to 1 700 m³/h independentpumping line combinations are available • Pumping speed and ultimatevacuum are similar to or better than corresponding conventional pumps • Noise level is divided by morethan two compared to conventional pumps.	Save footprint for a variety of applications • Between 30 and 50 % footprintgain when compared to stacked conventional pumps with the same pumping capacity, even more when compared to a typical full on-floor pump configuration • All existing semiconductorapplications are covered such as etch, HDPCVD, PECVD, SACVD, LPCVD, RTP-CVD,...

Increased safety • Exhaustable enclosure for all pumps including pump outlet connections and abatement system • Optional safety sensors such as gas or smoke/fire sensors • Lower pump weight means safer handling.	Faster hook-up • The centralized utilities and fullydefined vacuum connection locations results in significant reduction in installation and start-up time • The number of facilities connection can be reduced by more than six.	For 6 to 12" fabs The Adixen by Pfeiffer Vacuum ATPS series provides the ultimate solution for gaining or saving space in existing or new fabs needing a remote pumping configuration.

Outline dimensions

The ATPS 42 and 82 have been designed for abatement system integration. These abatement systems can be provided by selected partners, having a leading position for each application. The abatement technologies include, among others, dry bed, burner/wet, wet, or plasma for PFC abatement. The integrated abatement system enhances ATPS benefits such as footprint reduction, pipework integration and centralized facilities for faster hook-up/start-up, and higher safety.



ATPS 42 + Dry bed abatement	ATPS 42 + Burner/wet abatement	ATPS 42 + Atm. plasma + Dry bed abatement

*A=1300mm

Faster hook-up

ATPS is shipped with all pumps already installed, fully connected and tested in the frame.

Centralized supervision network

Compatible for all Adixen by Pfeiffer Vacuum stand-alone pumps and selected abatement systems!

Options / Accessories

A full range of accessories is proposed as: - a package which includes lighting tower, liquid sensor, air flow sensor, door opened sensors - powder trap, hot traps, cold traps,... a range of application based solutions to increase pump life time which can be safely integrated within the ATPS - seismic brackets - inlet isolation valves, with or without soft pumping - N₂ and cooling water flowmeters			Traps

Inlet valves, with and w/o soft pumping	Lighting tower	Flowmeters	Seismic brackets

Maintenance

Easy maintenance with specific tools

Transport of one A300 pump

ALT 22 elevating table

Technical specifications

	ATPS 42	ATPS 82
Peak pumping speed (50/60Hz)	From 95 to 1 700 m³/h (55 to 1 000 cfm)
Ultimate pressure w/o purge/ with 35 slm purge, mtorr	A100/A300 pumping line = 5/ 50 Roots pumping line = 0,5/ 5
Noise level (at ultimate pressure), dBA	58 to 65 dBA *
Dimensions (W x D x H at top frame, w/o abatement), mm	460x1300x1902	920x1300x1902
Power voltage	200-208 V or 380-460 V
Inlet/outlet size	SO 63 or ISO 100 / KF 25
Cabinet exhaust requirements (w/o abatement)	104 mm O.D, 100 to 150 m³/ (60 to 90 cfm) * - sub-atm > 150 Pa
Frame footprint w/o abatement	~ 0,6 m² / 6,5 ft²	1,2 m² / 13 ft²
Frame footprint with one abatement module	~ 1,6 m²/ 17 ft²	2,2 m² / 23 ft²
() depending on pump configuration*

Цена

По запросу

+7 (495) 781 39 39

sales@blms.ru

107023, г. Москва, ул. Электрозаводская, д.24,
стр.3, оф. В303

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Plug and Play Pumping Systems ATPS Series

ATPS 42 with 4 x A300s

ATPS 82

ATPS 42 with A300s + Roots

ATPS 42 + Dry bed abatement

ATPS 42 + Burner/wet abatement

ATPS 42 + Atm. plasma + Dry bed abatement

Faster hook-up